???????????????2015?????????MEMS?????????μ???0.2???????????????????????30%???????????????????????????????粩????mCube?????μ????δ??????0.15???????????????顣

????3??MEMS??????BMA355???????1.2 x 1.5 x 0.8 mm

??????????????????????????????г????????????????豸???????豸?????????й????????????????????????????????

???????CEO?????????й???????????o???????????й?????????????????????????3?????????1kk????????????????????о?????????????????????????С?

???????????????Sitronix?????δ???3S??????蟣?Richtek???????????Dyna Image????GlobalMEMS??????????е???????????г???

??????????й?????????????????????????г?????????????????????е?????????????????????????????????????

???????????????й????????????????????MEMS??????з?????????????????????????????????

???磬?????????????????MEMS??????MEMS???繒????????????????????????????????????С???????????PS3606???????1.1 x 0.9 x 0.45 mm????????????200mm CMOS-MEMS??????????о???Щ???????????MEMSо???

????????????????????С???????????PS3606

?????????????????????????????????“???”?????????????????0.35????????δ?????????????0.2?????