?????????????????Northeastern University????????3????????????????????“??????????????????????????????”??Advanced Nano-manufacturing Cluster for Smart Sensors and Materials??ANSSeM????

ANSSeM?????????????????У??????????????????????????????????????????????????δ????????????????????????????Massachusetts Technology Collaborative?????????????з????????????Collaborative Research and Development Matching Grant Program??????????

??????????????????1100???????????????????????????????????????????????????????????

??????????????????????George J. Kostas Research Institute for Homeland Security??Tufts University??University of Massachusetts in Boston????????????????Rogers Corp.??General Electric (GE)??Milara Inc.??Raytheon??HC Starck??GloTech/OptoGlo???

ANSSeM????????????????????????????о??????Center for High-Rate Nanomanufacturing??CHN??????????????——Nanoscale Offset Printing System??NanoOPS?????ü????????????С??20nm???????????????????????????????ī?????3D???????????100~1000????