???????????й??????????????????????? ?????

??

MEMS?????????????????￡????e??????湤??????????????????????????????????е???μ????????????????MEMS??????д???????????????MEMS?????????????????????????????2011??????19%???г???????100???????????????????????????????????MEMS???????????????????????????硢DMD????ī???RF MEMS???????????????????????????MEMS??????????????????С??????С??????????????????????????????????????NEMS?????????????????????????????????MEMS??????????????ɡ???CMOS???????????????????????????????????????????????????????????MEMS????????????????????顣

????

??????е????MEMS???????????????·????????????????MEMS?????????е????????????????????????????????????????????·??????ɡ?MEMS????????????????????????MEMS???????????????????????????????MEMS????????????????????????????????價????????С???????????????????????????????????????????“MEMS”??????????“?????”??micromachines???????????“???”??microsystemes????MEMS??????????????????????50???????1954????????????Si??Ge???????Ч???????????Si??????????о?????1987????????Siо??????????????????????????????????????????о???MEMS?о?????????[1]??Siо?????С?????????????????????????????????“С???????????”??????????MEMS??????????????1987??2000???13????????????????????????MEMS???????Si????????????????????Si????????MEMS??????MEMS???μ????????з??????????????????????????????????MEMS???????????????????????????????ī????????????к??????????????????MEMS??IT???С?RF MEMS?????????????????????MEMS???????????MEMS?????????????г???2006??2007??????????????????綽??????????￡???MEMS?????????????????????????????????е?????????????????????30%??????2015????17.5??????????[2]??2010??MEMS?г????????25%??2011???19%???г???????100????????????????????г????????1.8%??

?????????????????????????—?????·????“???????”???????????????????????о?????SoC??????????????·???γ??μ????CMOS????????·???????????С?????????“???????”????“More Moore”??2011????????????22nm??????????????·???????????????·?????????????????????о????γ?????????????????“??????”????“More than Moore”[3]??MEMS????С?????????????????????????“More than Moore”????????з?????????á?

???MEMS????????

MEMS??????????·?????????????CMOS?????????????????????????MEMS???ж?????????????????????????????????MEMS?г??????????Si????????????????????????????????????С??????MEMS??????????????????????????????????????????????????MEMS??????????????????δ??????????2???????????MEMS??????????????????

?????MEMS??????

1979????α?????????????Si MEMS??????????????????MEMS????????????Ч???????Si???е??????????????????????????Si???е??????????м?????????????????????????MEMS????????????????е???????????á????????????????????????????????????????У?????MEMS???????????е????????????????????????????????MEMS??????????????????????????????????????ESP????1998???????Si?????Si???е???????????MEMS??????????????????ESP??????????е??ESP????????????????????г???2005?????????Ч????????Si???е???????????????????????????γ??????EPS????????????[4]??????????????????????????????????????е???????ASIC??·??????????????????????????????Si???е????MEMS??????????????????????ASIC??·???????????????飬?????16?????????????

??2000????????MEMS???????????????????г????????????????????г?????????????????????С???????????????????????????????????????????????????[5]????g??????????????е??????????????????????????????????о??????????????????????鼰У???????????????????????г??????????????????????????????????????????????????MEMS??????????????????????????С?

??????????????????????????????????????????????MEMS??????????????±0.1mg??VRE?10μg/g2????g?????MEMS?????????20??g????????????????????е?????MEMS????????????g???仯????????????????????????????MEMS???????Z??CMOS-MEMS?????????????????????

??????MEMS??????

1993??Si???е???г??????????????????????Si???е??????????????????????????????????????????Si???е???????????????????????????????EPS????????2005????????EPC???е???е????Si???????е?????????????????е????????????е???????????????????????????????????????????????????????????·??ASIC??·?????????????EPC?????и???????????????????????ú???[6]?????????????MEMS????????????????????????????????????????Ч??????У???????????????????????????????????????????????????????????????????????????????????????MEMS???????????????????綽????????????????г???

????????????????????????????????MEMS??????о???????????·????????????????MEMSо?????????????????????????·??????????????????????????MEMS????????????±500°??????????????±300ppm????????????0.002°/√h???????????0.04°/h???????????0.1°/h?????ù??л????????????????????MEMS???????????????????????????????????????????С??0.01°/h????????????0.001°/√h????????????????????SOI?????MEMS?????????????????????????????????????????1.7KHz??????????????????Q?????0.31??0.64???????е???????1nm/°/h?????????????е-????????0.01°/h/√Hz??????CMOS-MEMS?????????????????????????????????5×5mm2о??????????????????Z???????????????????·?????????????????????

??????MEMS????

?????????????????????MEMS???硣????????????????????????????????????????????????????Χ???????????????????MEMS????????????????????????????????????0.1μm???????????????????й??????????????????????????????????????????????????????????????????????????г??????????????????????????г?????????????????????????崫??????????????90????????????????????????????????y???豸???????????Χ???????????????????????Щ?μ???????С??????????????磬???????????????????????????????????????г??????MEMS???????????????MEMS?????????????????2003??-2005??????????Si???????????綽?г?[7]??????????е?????????Si?????????о????????????????崫????????????????????????????????????????и?С??硣2006???????????MEMS???????????????г???MEMS???粻???????????????????????????MEMS???簲??????????????????λ??????????RF??EM????????ε???????г??????????????о???ASICо????????о????MEMS???磬????????о??????????繅????繅???????????????????????д???о????????????????????????????????????????????????????62dB????????38dB?????????50Hz-20KHz??????????綽??????????г???????????2013??MEMS????????????10?????

MEMS??????????CMOS-MEMS?????????[8]????ü????????????о???MEMS???磬????????CMOS??????????е???????/????????·????????MEMS????????ü???????о???????????С??Siо???????????С?????????MEMS???硣????Si?????????о???????????????????????С?????????AlN?????????????MEMS????????о???

??????????????DMD??

1987???????????????1994?????????DMD???о???????????????DLP?????????????1996?????DLP?????????????????????????????????DMD??TI???????????50???DLP??????2006???ù????10??乲????1000???DLP????DMD???MEMS??????????????[9]??DMD?????????????MEMS??????????DMDо???480000??????17×17μm2????????????800×600??????????????SRAM??·??????′???????μ?????????????????±10?????б??????????????????????DMD????0.8μmCMOS????????SRAM??·??CMOS???????????????????CMOS???????????????????????????????MEMS????????[10]??2005??????????HDTV???????????1920×1080??????10000?s1??DMDо????????200??????????200????????DMDо???????3DTV?????????DMDо?????????DLP?????????????????????????????????y?岥???

???壩MEMS??ī?

1977???о?????ī????????????????????????????????????MEMS??ī?????????ī?????????в??????????к?????????????????????????????????????ü?????????????????????????????????????????ī?????????У?1996?????????100???????ī???????????????С???????????????????MEMS????????á?????????????????????????????MEMS??ī???????????з????????Si?????Si????????е???????Si??100??????????????????????????????У??????????10μm?????????0.1pL????????35KHz????????????????????????????????[11]??2005?????????ī???????????????1pL????????????9600×2400????о?????3584??????????????????????????????????????????????????????????????????????????????MEMS??ī??????????????1200dpi????????????4800dpi????????????????????????????????????MEMS??ī?????????????????????1200dpi???????????????????????С??2μm???????????????????10??????????????????????Ч???????2010??????[12]??????0.35μm????????CMOS?????Si??100?????е???????????????????γ????????????ò???????????????????????о?????????????????????С??1μm????????????????????????????????Ч???????????????ī????????1200dpi?????????14μm?????????4pL?????????24KHz???????1.5×108?????????CMOS-MEMS?????????ī??????μ??????

??????RF MEMS

1979??????RFMEMS????????Si??????е???????????????????RF MEMS????????????????г??????FBAR???????ег?????????????/???????????????????RF MEMS???????????·?е?????????С??????????μ????·???????в???С??????????????CMOS??·????????????????????????????????????????????????

FBAR????Si???е????????????????????γ?г?????????????С??????????н??????2003??FBAR?????????°????????????CDMA???????г???2004??????????????????????FBAR??????????GSM????????飬???????С?????????????????FBAR???????????????RF MEMS[13]????FBAR???о??????????????????????ú????????????????????120nm???AlN?????FBAR????????????K???Ρ?????0.18μm CMOS?????????FBAR????????2GHz???????22μW???????-121dBc/Hz????100KHz???????????mW????1.5GHz???2?о???FBAR????????λ??????-124dBc/Hz????100KHz??????????????????????-??????FBAR??????????г??????????γ?????LiNbO3????????FBAR????????FBAR??

???ег????????Si???е?????????????????????е???????????????????????????????С?????????????????CMOS??·?????????????????????????????????ег???????????????????????????????????????е???ppm/yr????????????????ег????????0.5ppm/yr?????[14]??????2015?????ег????????????????г?????????????????ег???????о??????Q????????跡????????????????????????????????ег??????????????????????????70nm????????г??????????????????????Q???24800??CMOS-MEMS???????????????ег???????У???????????е??跡?????????2.3MΩ????220KΩ??????????????2???????????ег????????232.441KHz????????Q??146580??????p-n?????????????е????γ????????????ег????????3.72GHz??Q???18000??????????????????????ег??????г??????61MHz??

RF MEMS??????????Si???????е???????????????????????????????P-I-N??FET??????????????е?????????????????????CMOS??·??????????RFMEMS?????????????????????????????????????????????????????????÷????????LSICMOS?????·????????RFMEMS???????沨??????????????5GHz???0.07dB/mm??????TSV???????RF MEMS???????????????????????10GHz???0.1dB[15]?????????????????????RFMEMS??????????????5×108?Ρ?????RF MEMS???????????п??г???????????2-18GHz????????????????????

RF MEMS??????/?????????????????????????????????????RF????????????????и?????????????????????????????????????????????伯????RF MEMS??????????RF??·????????????????????????????????????·?????????????RF MEMS???????????????????????????????????RF MEMS??????/????????????????????????????????????????????????????????????????????????RF????????????з??????????RF MEMS?????????10GHz?????????10W??RF MEMS???г???????0.18μm CMOS???????????????????????[16]????2GHz??Q??87????????10?U1??г????????5GHz??

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δ?????????????????????????????????????????????????MEMS??????????г???????????????????MEMS????????????????????С??????????????????????????????????????????NEMS??

??????????????綽????????????????????????????????????????????????????????CMOS????????????????????????MEMS??????????г????????????????????MEMS??????????CMOS???????????????????????[17]????????е??????????????????????????????????y??????????ε????????????5nm???????λ??400nm-1000nm???????????????????????????????????????????

?????????????С?????????????????????????????????????????????????????????2008?????480×320?????DLPо???2D??????С???????????[18]??????????????????????????????????????????????????С?????????????2013???????????????С???????????????DPLо??????????????С?????????????Ч??????????????????????????????????????????????????辵???????????????????????????С????δ??????????С??硢?????????????????????????????

??????????????????п?????????Χ???????????????????????????????????????????????????????????????????С??硢???????????С???????·???????ó??????????MEMS????????????????á????з??????е???????к????????г???????????????MEMS?????????????У???????????????????ег??????????????????????????????ī???????????????е???????л??????????[19]???????????????????????й?????????????????С?????????????????????????????????紫??????????·???????????????????????MEMS????????·?????????????

???????????????????????????????????е?????????????????????????δ??????????????С????????????????????????????????????????????????????????????????MEMS????????????о????о??????е?MEMS?????????????:???????е?????????????????????????????δ????????????MEMS????????????????????????????????????????ж?SiC?????Si???????????????????0.8mm????16.95KHz?????????SPL??73dB;?????????????????????????????????????????????????????в???FBAR?????????AlN????????????100Hz??15KHz??SPL????60dB????9.3KHz??100dB;???????????????????????????????????????????????л???SOI??????Si???????????????15mm????300Hz??20KHz??SPL????70dB[20];??????????????????????????????????????????????????ν???С????????????????????????????????????????????????????????CMOS-MEMS???????????????????????????????????????????????[21]????8λ?????????????5.2mm×5.2mm??о????????522??????216μm????ξ????????С?????????????????·??????????????????50Hz??4KHz??SPL????78dB?????????????????????????????????????????????????г????檔

???????е????????????CMUT??????CMOS?????????????????????????????????糬?????????????????ó??????????????з??????????????е????????????ó?????????С????????????????????????????Я????????????????????????CMUT???γ?????????????????4D????????CMUT??????????????????????CMUT??????????????????????????????????CMOS?????з???33??CMUT??????[22]??????????3.5MHz??????33%-44%??CMUT???????????????????????????????????CMUT????????????????????????????????

???????????????????縲?????????????MEMS???????????????????????????????????????????????Si MEMS??????????м????о????????Si??????????????????????????8????????????????MEMS??AlN???????????????????????572Hzг??????2g??????????????60????????????MEMS????????????????70~150Hz????????????????5.1????????????????????????[23]??????????SiMEMS?????????????????????????????????????????????????????2??????MEMS????????????о???н???????????????屢????????????????????10????2??????30μW/cm2????????????5????2?0.5cm2????????????Bi2Te3?????????????????????????10μW?????[24]???????г???????????MEMS????????????????????????????

NEMS???????г?С??硢??????????г?????????????????????????????????NEMS????????????????????С????????????????????????????????????????????????CMOS??·?е???????NEMS?????????160nm??SOI??????????100nm???????????NEMS???????????????г????????????????????????10-21-10-24?????????????15nm?????NENS???????????С????0.1fJ???????б??С??3mV/decade[25]??????????????????з?????????????????????????????????????H2?????????????[26]???????????????С??????????????????????????????????????????????????崫???????????

????????????

?????MEMS?о????????????????????????“???????????????????????ò????”?????MEMS????????????????????????????????????????????Si??????Si??SOI??????????з???????н??????MEMS?о??????????з????????????????????????????????硢??MEMS??RF MEMS??????MEMS????????????????????????????г???????30%???????????????????????????????????????????MEMS???????????????о???????MEMS??????????С????????????????С?????????????????????о????????糡?????????????????????MEMS???????????????????????С?2008???????????·???????????????????6????8????MEMS?????????????????????MEMS????????????????????????

????????????MEMS???????????????????????????????MEMS????????????????MEMS???????????????MEMS???????????????????????????????????????????????????????????????????????????????????????????????????????????????????÷??????????????????MEMS???????????????????????????????г?????MEMS?????????/????????????????MEMS?????????????????????????г??????????ü?????????????????????￡??????????????????????????μ????????????????NEMS??????????????MEMS???????y????????????????????????????????????????к????????????????????????????

????
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