??????л???Yole??MEMS??????-2016?桷?????????2015?????MEMS?г?????119???????????????/??????????о?????????????2014???110?????????????8.2%?????2021?????200???????????????300????

????MEMS?г????????????????????????????????????е??????????????MEMS???硢RF MEMS?????ЩMEMS??????????????????г??????????????????????????????????????????????????????????????????????????????????????????????????????

Yole???????2015??????????30??MEMS????????а???10???????????????Denso???????￡?Panasonic?????????Canon?????????Asahi Kasei Microdevices????????Murata?????????????????Alps Electric?????????ROHM????????Sony??????????OMRON???????????Epson????

??MEMS??????-2016?桷???溭????????10??????????????????????????????Щ?????????????????

1. ????MEMS

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??????????????????????????????????????????????????簲???????????????????????????????????й??????MEMS????????????????????????????????

2. MEMS???

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3. ????????

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4. ??ī????

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???????????????ī?????????????????????????——“QMEMS”???????????????????????????????з???С??MEMS???????????2mm x 2mm??

5. MEMS????

??????MEMS???????????????????????????????????????????????????????????MEMS???硣??????????壨ST?????????MEMS?????????

??????????New Japan Radio????2013??8????????MEMS???磬????????????????????????????????????MEMS???磬???????????????????????——???磨UMC????

6. ???????????

TDK??MEMS???????????????????????????????????????TDK?????λ??????Kofu????????????????????MEMS???????2016??7?￡?TDK???????????????MEMS??????——Tronics Microsystems???ó????????????????????????????????????????????TMR????

?????????????????MEMS????????????????????2011??????????????MEMS???——VTI Technologies???????????Murata Electronics???????????????????漰????????????????????????????????????????????????????????????к????г???

?????????????MEMS???????????MEMS???????????????????????????????????????????GENIALLIGHT?????????????????????????????????

7. ????MEMS????

?????MEMS???????м?????????????????????????????????????????????????????????缼????????MEMS???????2009?????????????????MEMS???——Kionix??????????????????

????????Fuji Electric???????MEMS????????????????????????

??????MEMS????????????????????????????????????????????????????????????????????????MEMS????????

???????MEMS??????к??????????MEMS???????????????????????????????????RF MEMS??????????RF MEMS?????MEMS?????????RF MEMS????

?????棺

??MEMS??????-2016?桷

????????????????????????-2016?桷

????ī?????г?????????-2016?桷

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??2015-2019?????????MEMS?г???