???????????????????λ???????????????????????Э??——????????豸?????Э??SEMI??????????????????????MEMS?????????????????????????????ξ???????MEMS??????δ?????A.M. Fitzgerald and Associates?????MEMS?????з?????????Alissa Fitzgerald??SEMI?????MEMS????????д??MEMS & Sensors Executive Congress????????????????????????MEMS??????????????500??????????к?ó????????????????

Fitzgerald??????????“?????10???????????????????Щ??У?????С?”2017??????????????????????????????????????????????????????????????????????????ò??????????????

A.M. Fitzgerald???MEMS??δ????????????????????Rogue Valley Microdevices??С??MEMS???????У????Soitec???????????????SOI??????????????????о???????????????

Alissa Fitzgerald??2017??MEMS & Sensors Executive Congress????????

Fitzgerald????????????????MEMS????????????????20????80??????????3D????????????????漴Kurt Petersen???????????????е?????????????????????????????????????ī???????????????MEMS??????????У?DLP?????????????????ADI????MEMS??????????????????????????????????????е??????????????????????

Fitzgerald???“?????????????????????????????DRI??????????μ?????????????????????????MEMS??????????????????????г??????FBARs?????MEMS???????????????????????????????????MEMS??????”??????????????“????????????????????????InvenSense???????MEMS?????????????ASICs???м???????????????????????????????????????衣”

?????????????RVM?????Jessica Gomez??????Soitec???????Nazila Pautou

Fitzgerald???????????ADI?????????????????????50%???г???????????400??С??????????????????????????????????????г???????400??С?????????????λ??

???????Щ?????г???????ζ??????Fitzgerald????????????????????“?????????????????????”????????е???????????Fitzgerald????????????????о?????з??????г???????????????????????????????????г???

RVM??????????????????A.M. Fitzgerald???Soitec??SOI?????MEMS???

Fitzgerald?????“???δ????????????????У?????????????????????2017???????500?????????????????о??????????????о?????????????????????????仯???ɡ?”

?????????

??MEMS??????-2017?桷

??MEMS????г??????????????-2017?桷

??MEMS??????????????????-2017?桷

??????MEMS????????г???????????-2017?桷