?????Teledyne e2v ?????Pierre Fereyre??Gareth Powell

I. ????

???????????????????????????????????????Charge Coupled Device??CCD?????????????????“???????”[1]??????????????Sony??2015?????????????????????????е???????????????????????????CCD?????????????????????????????????????????????????????????????????????????????????[2]??????????????????????????CMOS ??????? (CIS) ??????г????????????????CCD????????????????CCD???????????CIS??????????????????????????CCD??CIS??????????????????CCD????????????????????????????????????????CMOS???????δ??????????????????????????????????????????????????????????????????????????????????о?SoC???????????б????濼??????????????????????????С???SoC??????2000???????????????????????????CIS????????????????????????涼????CCD????????????????????“??????”?????????????CIS????????????????????????????????????????????????6500???????????￡?

II. CCD??CMOS????????

CCD?????????????????????????????????????????????????????????????????????Щ????????????????洢??о?????CCD????У???????????????????·??????е??????????????????????????????·????????????????????о?????CMOS????????У??????????????????????????????С?CMOS???????о????????????????????????????????????о??????????й??????????????????????????????????????????????????????????????CCD????NMOS??????????????????????衢???Σ?antiblooming???????????κ??????????????????????????????????CMOS?????????????????·????CMOS?????????????????????????????????????????????????

?????????CMOS??????????????????CCD??????????Ч?????CCD????????????????г???????????????????????????г???????????????????????????CCD?????????????[3]??????????????????????????CCD????????????CCD??С????????????????????????????????????????????????????????????????????????CCD?????????????????г??????????????????????Щ?2?????????Ρ?????????????????????????????????????????????……

CMOS????о?????????????????????????????????????????????????????CDS??????????ɡ????????????о???System-on-Chip??SoC?????????????????????????Щ???????????????????е??????????CIS??????????180 nm??????65 nm??1P4M (1???????4?????) ????????????????????????????????????????????????????????CMOS??????????ж??????CCD?????????CMOS??CCDо?????????????????о?????·???????????и????????????????????????????????????

?1 CCD??CMOS?????

??1 CCD??CMOS??????

??????棬CIS?н??????????????С??????????????????????????????С????????????????????????????????????CMOS?????????????????????????????????????????????????????????????????CMOS??????????????????????????????????????????????????????????????????仯????????????????????CCD?????????????????CCD??CMOS?????????н?????????о?????????·????????CCD??????????о??????????????????????????????????CCD??????????·?????????CMOS?????????п??????CCD????1?????CCD??CMOS???????Щ?????????????????????????????????????????????????????????CMOS???????????????????о???SoC?????????????????????????????

III. ???????????????????

?????????????????С????????????С?????????ε?????????????????????????????????????????????????????????????????CCD??CMOS?????????С?????????????????????????????????????????????????????????????Чλ??Least Significant Bit??LSB???????????????????????????????????????????

??????????fc????????fs??N????ADC??????????????????????N=12???????????

????????????????????1/f????????????????????2??????????????????г??е????????????A?????????????????????????????????????????????????о?????????????????????????1/f ????MOS????????????????У?????????????????????????????????????????????????????????????????????Щ“????”???????????????????????[6]????????????籨????????Random Telegraph Noise??RTS)???????????????????Lorentzian mathematical model??????????????“????”??????????????????????MOSFET??????淶Χ??????“????”??????1/f??????????????????????????????????????????1/f??????MOSFET???????????????????????????????

?2 ??????????

???????СCIS??????????????????????????????????????????????????????????????????????CDS??????????????????????????????????????????????

??????У?fs?????????n??CDS????????n=2???????3?????????????????????????????????1/f????????????????????????fs????????????????仰?????????“????”???????????CDS??????HCDS?????????????????????????????????3??????Ч????????????е?eqBP1 ??????????????????????eeqBP1?????????????????2?????????????HCDS???????Ч?????????????eqBP2 ??eqBP1???????????????ü????????????eqBP2 ?????????????????????????б?????

?3 ???????????

???2???3????????????￡??????????????????????????

?????(1)??(4)??????ó????彎?????????????????￡?

?й?????????????????????????CCD???????????????????????????????????????Щ??????????????????????????????????С??????????????????????????????????????Щ????У???????1/f???????????λ??????????????У????????????????????????????CCD??????????????????????????????????й????? [5] ??CMOS ??????????????ж???????????1?????????????????????????????????????????CCD?????????????CIS??????????????1/f????????????????????????CMOS?????????????????????????????CIS??????1E-??????Χ???????????????

?4 ???????????fs?????

IV. MTF ?? QE???????????????

????Ч???Quantum efficiency??QE???????????????????????????????????????Ч????κ???????????????????Signal-to-noise ratio??SNR) ?????????????????????????????????????????????????????????QE??????????????????????????????????????????????????????CCD??CMOS??????????????CCD??QE???????????ж????????????????????CIS??QE??????????????????????????????????????????????????????????????ú?????????????????????????????????QE????????????????Beer-Lambert law???????????????????????????????S?????????CCD???y?????????????Back Side Illumination??BSI??????????????QE???????near infrared??NIR????ж?????????????

?5 QE???

???д???CCD??Interline Transfer CCD??ITCCD???????????????????????????ν??“??????”??Vertical Overflow Drain??VOD????“???????”??Vertical Anti-blooming??VAB???????VAB??????1980???????????з?????????????????????????????????????е?NIR?????

?6 ????????

?????????ITCCD?????BSI?л??檔?????CCD???????????ι?????????????????????CMOS???????????????в??????????????????????????????????д????????????ITCCD????CIS??????????????????????????????????Modulated Transfer Function??MTF) ???????NIR???????ж???????????????????????????????????紮???????MTF???????????????MTF??QE?????????????ν????????Ч??Detective Quantum Efficiency??DQE???????????????????????????????6??????ù??????????MTF????????deep depletion???????????????????CIS???????????·????ü??????????DRAM/??湤?????????????????????????????????????????????????о?????????????CIS?????????????????????????QE???????????????CCD?????????5?? [9][10]?????μ?CMOS???????????????????????????絼??塢??????Deep Trench Isolation??DTI??????????????????????Χ????????????????????о????????

V. ???????

“????????????”??Pinned Photodiode??PPD????“????????????”??Hole Accumulation Diode??HAD??????????????????????????????????????????ITCCD?????[12]??CMOS????????????????????2000???????????ITCCD?????????[11]?????7???????CMOS?У???????????????????????????????????? CMOS?????????????????????????electronic rolling shutter?????????????????????????????????3T??????????????н????????3T?????????????·????kT/C??????????????????????????????????????????????????

?7 ITCCD??5T CMOS??????

?????????????????????CIS?????????????????????????????????????????????????4T?????С?4T????????????????CDS????????????????????????????????????????乲?ò??????????????????Ч??????????????????????????????????????????????????????????Χ??????????????????????????????????????????????8?????????????????????????????ERS????????????Ρ?PPD???????????????????????????GS???????????????ERSα??????????????????????????????????????????PPD????????????5T???????????????????????????????????????????????????

?8 ???覴??CMOS ERS????

???????GS??????????ITCCD?????????Щ????????????????С?

?9 ???覴??CCD???

????????????????????????????????????????9????覴????????????????????????????????????????????????????????????????????м?????Frame Interline Transfer??FIT??CCD??????FIT???н???????????????CMOS??Ч?????????????????Ч???Global Shutter Efficiency??GSE?????????????????????Parasitic Light Sensitivity??PLS????????????н?????????????ж??????ITCCD??GSE????????-88dB??-100dB[13]????CMOS????-74dB??-120dB??????3D???????-160dB[14] ?????????????????????????zerogap?????????????????????ж????СCMOS??????????????????????????????????????????????????GSE?????????????

VI. CMOS????????δ??

CCD????????????????????Time Delay Integration??TDI??????TDI??????賡??????????????????????????????????????????????????????????ɡ?????????????????????????????CIS CCD??????????????壨MTF????????????????????????[18]???????????u????????????CMOS TDI?????μ???????????????????????????????????棬CCD???????????????????ж???????????????????????????????????????CMOS??????????CIS CCD????????????????????????ADC??????????[17] ??????г????????CMOS???????????ж???????????????????м???????????????????????????????????????????????EMCCD[15] ??????????????????????????????????г??????????????????CCD??CMOS?????????????? EMCCD????????????????CMOS??electronmultiplying CMOS??EMCMOS????????[20]?????EMCCD??EMCMOS???????????????????е????????????????????????????á?CMOS??????????????С????????????????????????????????????????ν??SWAP-C??????????????????????????????κμ????κ????????????????棬???????????????????????????????CCD?????????????????????????????????????????????????б?????CMOS??????????????????????????????????澧?????????????????????????????[16]??

????3D????????У???????????????????????Time-of-Flight??ToF????????????????????ó???ToF?????????????????????????????????????????????????????????????????????????ó??????????????1995???? “????”CCD????????[21]????ToF??CMOS???????????CCD????????????[22]?????????????????????????????????Current Assisted Photonic Demodulators??CAPD??????????????????????????3D??????????????????????е??????????????????????????????????????????????????????????????????ADAS????????????CCD?????????????????????CMOS?????????????????????????????????

CMOS????????????????μ???÷?Χ????????????CCD??1980???????????????????????vidicontubes???????????????????????Single- Photon Avalanche Diode??SPAD????????????????????籶?????Photomultipliertubes??PMT??????????????SPAD????????????ν????????Geiger mode???У???????????????????????p-n ???????????????????κ???????????????Ч??????????????????в??????SPAD???????????????????????????????????????????????????????????MOSFET??????????????????????????????????u???????????????????????????????SPAD????????????CMOS????????????????????????????????????????????????·??SPAD???е???????????????????????????? SPAD??????????????????????????????CMOS???????????????????????????????????????????????У????????????????????Щ?????????u????????????[23]??

VII. ???

?????Щ????CCD????????????????????[1]??????????????????????????????濪??????CMOS???????????????????????????????????????????????????С????CMOS???????????????Щ??????????С?????????????????????????????????????о??????????????????????????????????????????????и???????????????????????κι??????????????????????????????????????Щ??????????????Χ????檔???????????????????????г???????????????????????????С?????????????????????????????????????????????????????????????飬????????????????????????μ?????????????????????????????????????и???????????????????????????????????????????3D????????????t???CMOS??????????????????????????????顣?????????????????CMOS???????????????????????????????

?ο??????REFERENCES??

[1] Active pixel sensors: Are CCD dinosaurs? ER Fossum IS&T/SPIE's Symposium on Electronic Imaging: Science and Technology, 2-14A.

[2] http://www.vision-systems.com/articles/2015/03/sony-rumored-to-discontinue-production-of-ccd-sensors.html

[3] CCD vs. CMOS, Dave Litwiller, Photonics Spectra, 2001

[4] Determination of the optimal electrical bandwidth in CCD- and CMOS-based image detector applications, Robert H. Philbrick, SPIE 5499, Optical and Infrared Detectors for Astronomy, 2004

[5] CMOS vs. CCD: Changing Technology to Suit HDTV Broadcast, Lester J. Kozlowski, 2003

[6] Fundamental performance differences between CMOS and CCD imagers: Part 1, James Janesick et al., SPIE 6276, High Energy, Optical, and Infrared Detectors for Astronomy II, 62760M, 2006

[7] A 0.7 e-rms Temporal Readout Noise CMOS Image Sensor for Low Light Level Imaging, Y. Chen et al., IEEE International Solid-State Circuits Conference (ISSCC), 2012.

[8] http://www.caeleste.com/caeleste_publications/2011CNES/20111207_CNES_caeleste_presentation.pdf

[9] L²CMOS Image Sensor for Low Light Vision, Pierre Fereyre et al., International Image Sensor Workshop, 2011

[10] Night Vision CMOS Image Sensors Pixel for SubmilliLux Light Conditions Amos Fenigstein, International Image Sensor Workshop, 2015

[11] A Review of the Pinned Photodiode for CCD and CMOS Image Sensors Eric R. Fossum, et al., IEEE Journal Of The Electron Devices Society, Vol. 2, no. 3, may 2014

[12] No image lag photodiode structure in the interline CCD image sensor, N Teranishi et al., Electron Devices Meeting, 1982 International (Volume:28 ), 1982

[13] http://www.sony.net/Products/SC-HP/new_pro/may_2014/icx825_e.html

[14] A 3D stacked CMOS image sensor with 16Mpixel global-shutter mode and 2Mpixel 10000fps mode using 4 million interconnections, Symposium on VLSI Circuits (VLSI Circuits), T. Kondo et al., pages C90 - C91, 2015

[15] M. S. Robbins and B. J. Hadwen, “The noise performance of electron multiplying charge-coupled devices,” IEEE Transactions on Electron Devices, vol. 50, no. 5, pp. 1227–1232, May 2003

[16] Electron Multiplying Device Made on a 180 nm Standard CMOS Imaging Technology, Pierre Fereyre et al., International Image Sensor Workshop, June 2015

[17] First Measurements of True Charge Transfer TDI (Time Delay Integration) Using a Standard CMOS Technology, F. Mayer et al., International Conference on Space Optics, 2012

[18] CMOS long linear array for space application G. Lepage, Proc. SPIE 6068, Sensors, Cameras, and Systems for Scientific/Industrial Applications VII, 606807, 2006)

[19] Time-Delay-Integration Architectures in CMOS Image Sensors G. Lepage et al., IEEE Transactions On Electron Devices, vol. 56, no. 11, November 2009

[20] R. Shimizu and Al., “A Charge-Multiplication CMOS Image Sensor Suitable for Low-Light-Level Imaging” IEEE Journal of Solid-State Circuits, vol. 44, no. 12, pp. 3603-3608 December 2009

[21] The lock-in CCD-two-dimensional synchronous detection of light, T. Spirig, P. Seitz et al., IEEE Journal of Quantum Electronics, Vol. 31, Iss. 9, p. 1705 – 1708, Sep 1995

[22] Demodulation pixels in CCD and CMOS technologies for time-of-flight ranging Robert Lange et al., Proc. SPIE 3965, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications, 177 (May 15, 2000)

[23] 320 x 240 Oversampled Digital Single Photon Counting Image Sensor N. AW. Dutton, VLSI Circuits Digest of Technical Papers, 2014

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??CMOS?????????????-2017?桷

?????????????г??????????-2017?桷

?????????????????-2017?桷

??3D????????-2017?桷

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