?й??????????????о?? ???

???IEC TC47/SC47E (?????????????????????????) ??IEC TC47/SC47F (MEMS??????????????) ????????鼰MEMS???????????????????????????????й??????????????37λ???μ???й??????????й??????????????о?????е?13????????704?????л????????????????????????????????????????λ??12???????????μ???????????顣

IEC TC47/SC47E?????????????飺WG1 (???崫??????????)??WG2 (?????????????)??IEC TC47/SC47F?????????????鼰??????????飺WG1 (???????幤????)??WG2 (MEMS?????????????鷽????????)??WG3 (MEMS???????????????)??MT1 (????????)??

1??18????????????????

?????????????????????IEC 60747-14-10????????????14-10????????崫???????????????????????????????????IEC 60747-14-11????????????14-11????????崫?????????????????????????????????????沨??????????????????????18??????????????????????1??

????????????????????????????CD??Σ?

(1) IEC 62047-32?????704?о??????й??????????????о??????????MEMS???????????????????????漲??MEMSг???????????????????????????????????????MEMSг?????????????????????????20????80????????????????????????н???????????????????????????????????????????е???????????е???糡???????????????????????????????????????????????棬??MEMSг??????????????????????????????????????????????????????????????????й????????????

(2) IEC 62047-33??????????????漲??MEMS???????????????????????塢?????????????鷽??????????MEMS???????????????????????????????????淶????????????????????????????塣

(3) IEC 62047-34??????????????漲??MEMS?????????????????????????????????????????????????????衢??????????????? (???????????????????????????????????????????????????????)????????? (??????????????????????????????????????) ????????????????????????????????????????????????????????

?????????????????????IEC 60747-14-11??IEC 60747-18-3??IEC 62047-31????????????????????IEC 60747-14-11?漲????????????????????????????????????沨??????????????????????????????????????в??????????????????????????????????????IEC 60747-18-3?漲???????CMOS????????????з???????????????????????????????????????IEC 62047-31????????????????????????????????MEMS????????????????

2????????????

??λ????SC47E???鴦???IEC?3???????TC124 (???????????????????????)??????ü??????????IEC 60747-14-10?????????????

????????????????SC47E?????μ?????????——???????????????????飬?????????FET??????????????д?????????÷????????????????????????鴦??????????????????????????????????????

???????鴦?????IEC/TC49 (??????????????????硢???????????????????????????????) ??IEC 60747-14-11?????????????TC49????????漲?????????沨?????????TC49/WG13 (??紫??????????) ?? ????SC47E/WG1??TC49/WG13??????????????(PT60747-14-11)??????????????

?????????????????????????????????? , ????????????????????楨?????????????????????????????????

3??MEMS????????????

IEC TC47/SC47F??2008??????????????? ???????MEMS??????????????TC47???????????????????????????????????5?????????????С??????????????????MEMS??????????????????????????????????????飬????WG1?о????MEMS?????????????????? ??WG2?о????MEMS??????????????????? ??WG3?о????????????淶??????????÷???????????????26???????????????MEMS??????????MEMS??????????????????????(??MEMS?????????????) ??4?????淶 (??MEMS??????淶)??

??λ??飬???鴦??????IEC 62047-1??IEC 62047-4??????????MEMS????????????????????????????????????μ?????????????????????????????????????????????????

??????2007??????????????????????С??????????????????MEMS ??????????????????????????????MEMS??????????????4????? ?????? (??????????й?)——??????????????????е???????????????Takahiro ONAKADO( ?????????????)——??????????????????????????????Kazuki TAKASHIMA?????????????)——???????????淨?????????????????????????Kim KWANG-SEOP (??е??????о?????????)——???????????????????????????MEMS????????????????е?????????????????????????????????????????????????е???????????????????????????????????????????????淨??????????????仯????????????????????????????????

4?????????????????????

MEMS???????????г???y???????MEMS??????????MEMS???????????MEMS???缸???????????豸?????MEMS????????????MEMS??????????????????????????????豸?????y???????????????

?????????????????г???????????й??г?????MEMS????????????????????????MEMS?г???MEMS????????????????????????????????????????????????????????????????????????????????????????????????

??????MEMS??????????????IEC 62047-25:2016????????????????????MEMS?????????????λ????????????CD??Σ?δ?????????????MEMS???????????????????????????????????????????????????????????