???????е????????????о??Carlos Gerardo???????????????????

???????????????????????г????????????????????????????е?????????????University of British Columbia?????UBC?????о??????????t??????洫?????????????????????е??????????????capacitive micromachined ultrasound transducers????????CMUT?????????MEMS????????????????

???о??????“Fabrication and testing of polymer-based capacitive micromachined ultrasound transducers for medical imaging”????????????????????????????Microsystems & Nanoengineering??????о???????????в??????????????SU-8?????????Omnicoat????????????????????????????е???????????????С?

?a??????PCB?????64??poly-CMUT??????????????У??b??6??CMUT????????550μm???c??CMUT???????????????繅???????????

????6?????裬??????????100??????λ??????о?????????????????????????????????????????CMUT????????poly-CMUT??????????????64??CMUT??????????????У?????????????4 × 75??CMUT????????????MEMS????????????????550μm??????????????о??????????ò??????μ??????о????????????顣

??????Щpoly-CMUT?????????????繅?????????????????????????????????????????CMUT???????????????????????о???????????б??棬poly-CMUT?????????????????????????????????У???????????????????е?????????????10 V?????????????12V????????????

???о????????????????????????????????150°C???????ζ????Щpoly-CMUT????????粨??????????Tx/Rx??????????????????????о???????????????????????????????????ο??????????????????????С?

???????????UBC?????????????????Robert Rohling???????“?????????????????????Щ????????С??????????????????????????????????????????????????????г??????????????ü??????????????????????”

?????????

?????????????????????????????м?????

??2016-2020????????????????г???

??MEMS??????-2018?桷

?????????ó?????????????