????ī?????MEMS????

???????????????????1975???????Kurt Petersen?????λ??????о?????????????????MIT????????????????????????????IBM Almaden?о??????????????????????????????????????й????????????????????????????????????????????????????????????????????????????????????????????????

????????????￡????????????????Petersen????????????????????????????????ī?й??????????????????????????????????????ī????????????

?????????????Petersen??δ????????????????????????????????????Щ????????????????????????????????????????????о???????????????????????о??ù????????????е????????????????????м???????????????????Щ????е??????????Microelectromechanical systems, MEMS???????????Petersen??????????????????????MEMS??

???????滮??????μ?????·???з?MEMS?????????????????????????????????????????MEMS?豸????????MEMS???????????????????MEMS?????????Petersen?????2019???IEEE?????????

??????????“????????——??ī”???Petersen????ж????й????ù????????????е??????????????????IEEE Transactions on Electron Devices??Applied Physics Letters???Journal of the Electrochemical Society????????????????????????????????????г??????????????MEMS????????????????“???????????????????о??ù?????????????????????е?????????????н????????????????????????????о???????????????????????о??????”

???Petersen????????????????MEMS?????????????????1???Щ??ī???????????????????“?????????????????????????е??Щ????????????????????????????????????????Щ?С???е???????????????????????????????????????????????????????????”???????????????MEMS????????е??????????????????????????γ??????????裬???????????????μ????????б??????????????????????

??????????????????????Щ??????????????????????100????????0.5?????????????????IBM?????????????SEM??????????????????????????????????????????????Щ???????????????????????????

“????????????”Petersen??????“????δ?????????????????????????”

Petersen??????????????????ù?????????????????MEMS??????????MEMS?????????????????????С????????????????????????????????????????????????????λ??????

????????????????????????о???Petersen?д???????????????????????????檔“?????????е???????????IBM???????”??????????????е????????????д???????????????ī???????????IBM???????????

?????Petersen??1982??5?·?????Proceedings of the IEEE?????????￡???????MEMS???????????

Petersen???????????????????ЩMEMS??????????IBM?κ????????????????????±?д????棬?????IBM????????????????50????????????Proceedings of the IEEE??1982??5?￡????????????“Silicon as a Mechanical Material”???????????￡??MEMS????????????????

???????????棬?????????·??????е????????????Щ??????????????????????????“???????????????????????????????????????ü??????????????????????”Petersen???“????????????????????????????????????￡???????MEMS???????????????”

“??????о?????????????????????????”?????????????Menlo Park, Calif.??SRI International??????????????CTO??Greg Kovacs?????“????MEMS????????????????????????????????????????????????????????????????????????????????????”

??????????????Petersen?????????????????????????????????о????????????Almaden???????“???????????????????о????????????????????????????????????????????????”????????????????????MEMS????????????

?ü?????????????20????80???????????????Petersen?????????????????????30??40???о???????о???????????1990?????????????????????????600λ????????????????????????????????????????????????С???????????????????MEMS????????????????е??ī????????????????????????????????????????ü?????????Petersen????ü?????1987?????????????????????????????????????????MEMS??

???δ????Transensory Devices

??????????????????Petersen?????????????????????1982??????Jim Knutti??????Transensory Devices???з???????MEMS??????

?????????????????????о???????????Щ“????”????????Petersen?????????????????????????????????????????????????????????????100????????????????????????????????????????“?????????д??????????????????????????????????????????”?????

?????????????λ?????????????Fremont, Calif.?????280????????????????????Щ??????豸??????????????????辧???????????????????????ú???????????????????Petersen??IBM??????????Щ??????????????????????????????MEMS??????

“??????????MEMS??????”Petersen???“????????????????”???????????????????????????????????β?????????????????????????????????????????????????????Petersen????????????????Knutti??????????????顣

Transensory???????????????????????Petersen????????????MEMS?????????г??????????δ?????

÷???????????NovaSensor?????“??????”

1985??Petersen??Janusz Bryzek??Joseph Mallon?????????????????л??Schlumberger???????500????????????NovaSensor?????Bryzek????????????????????MEMS???????????????Petersen???“Janusz?????????????Transensory?????????????????DNA??”

NovaSensor???????????????????MEMS?????????????????????????????????????????????????????????г??????????????????????????????????????????????????????????????????“???????????????MEMS???????????????????????”Petersen??????????????????????????????????????裨SOI??MEMS????????????????????????????

Lucas Industries??1991???????NovaSensor?????????Petersen?????“MEMS??????”???м伸???????NovaSensor??????????????????Amphenol???????

??????Petersen???????ζ???????????????檔???????????????????????о????ù????漰?????в??????????????????????????????ù????????????臨?????????????MEMS?????????????????????????????????????????????Petersen??????????????????????

???????Kurt Petersen????????????????MEMS??????????????????????ù?????????????????????????????????1990????????NovaSensor??????IBM Research????????CMOS/MEMS????????????????????????????????????????1993????NovaSensor????????????????????????????????1984????Transensory Devices??????????????????????1993????NovaSensor????

??Petersen??1995????NovaSensor???MEMS????????????????????????????????????豸?????????HVAC?????????????MEMS?????????????????????????????????????????С?

?????????????Cepheid??2016??????????????????Danaher????40????????

??Petersen??NovaSensor???????м???y????????????????????ī????????????Lawrence Livermore National Laboratory?????о??Allen Northrup???????飬MEMS????????????????????????PCR????????????????????μ????DNA???е??????Petersen????????Bill McMillan?????????????????????????PCR???????????Petersen????????????????????PCR?豸????????????????????????????????????????豸??

????McMillan?????尢???У?Palo Alto????????????????????Petersen???“????????Щ????????????????????????????顣”????Petersen???????????“????????”??

Petersen??1982??????????????????????????????????????д???????о????????????????????????????????????????????????о????????????о???????????????????????????????

“?????????????MEMS?????????????????????????????????п????PCR?豸?????С??????????????????????????????????????????”Petersen???

?????ü??????????Petersen??1996?????????Cepheid?????????????ī????????Livermore Labs?????????????????????1997??Cepheid?????????????????U.S. Department of Defense???????320????????????????????????????????????????Cepheid??????????豸Smart Cycler???????????MEMS??????????????????????壬????????????????????????????????????????豸??????????????????PCR?????????????

Cepheid????????????GeneXpert??????PCR?????????????????????????????????DNA??????????????????????????

2000??6?￡???????????????????????Cepheid?????????С?Petersen???“???????г????????????????е??????????”

??蹫????л????????????Smart Cycler???????????2001???????????????????????80??????GeneXpert???????????????????????2001??12???????

GeneXpert?????????????????????????????????????????PCR?????ü???????????????????????????????????и?????????

????????????????????????2001??9?μ??10?￡??????????????????????????????y???????????????????????20???????????5????????

Cepheid????????????????????似????????????????????????ù????????????????Petersen???????“??????Sanjay Gupta?????‘?簲??????Good Morning America??’??CNN?????????PCR???”

?????????????δ????η??????????????﹥?????????????????????????????????????????2001??12?￡?Cepheid?????豸?????????“???????????????”Petersen???

???????μ????????Cepheid????????·??3??????Northrop Grumman???????????????PCR??????????????????????????????????Petersen????ò????2003?????????????????е????????????Cepheid??????豸?????????顣?????Cepheid??????????????????????????????????粡???????к????????Cepheid???????????20???????????????????FDA?????????????????

??????????????MEMS?????????????SiTime

????2003??Petersen??????????滮?????????????Σ??????????г????????Щ??????????????????????????“???????IBM??????????????????MEMSг?????????????????????????????????????????”?????

Tom Kenny??Markus Lutz??Aaron Partridge??λ?о????????????????????????Petersen???“??Щ??????????????г?????????????????????????????????????????????????紦?????????λ??????????????????????????????????????е?????仯???????費???????仯?????乲?????????????仯?????????????????????????????”

??????????Petersen??Kenny??Lutz??Partridge??Joe Brown??????Transensory??NovaSensor??Petersen??????IBM???￡??????????????????????ò??????????????????????μ????????顣????????????????????????????Robert Bosch??????Щ????????????????????????????Petersen???ò?????1?????????????ü?????

“????1??????????????????????????δ?????飬”Petersen???“??????????‘????????????????????о??顣???????????????????????е?????????????’”???????????????????????ü????????????д??????

?1??SiTime??2004??12?3?????????????????????????????????衣SiTime??2007???????????г???????????MEMS???????????????????豸???????????????????

2008??SiTime??????????????????Petersen??Cepheid?????????????McMillan?????????????????????Petersen??????????????????????????????Petersen???“30????????????????????????????????????????????????????????????????????y??????????????????????е????????????????”

????McMillan????????Duke University???о??Natalie Wisniewski????????????????????????y??????????????????????????????????????????????????????Petersen?????????????У????????????????????????Profusa????????????????????ù???????30???????2018??8?????????4500?????C???????

???????????????????????????

Petersen??????????????????????????“???????????????????????????????????????????????????????”

????????????Petersen??????????????????????飬“?????λ???????湵?????????????”?????

?????????????????????????????????????λ???????????Berkeley??????????????????????MEMSг???????????????????????????????????Petersen??K.G. Ganapathi??????????λ?????????????????????Verreon??Petersen????????????????????Э???ù????2010???????????Qualcomm????

????Petersen?????ε?????????????????λ?????????е???????У??????SiTime???ι?????????й??CEO????“??NovaSensor??????λ????????”??ù???????????????Roger Grace???“Kurt??????????????????????????????????????????????????”

“??MEMS???????????Kurt????????м??????????????????????????????????”Grace???????“????????????Kurt?????????????????????????????????????????????????Ь?????????????”

Ganapathi??????Grace?????????“???????￡??????????Kurt??????????????????????”

???Petersen??????????????MEMS????????е?????＼???????????????????????70?????????н????????????????????????????????350%?????????????????????????????????????о?????й??????????????????????????????????250%??

“??????????????????????????????????????????????????????????????????????3??????15???????????????????????ж???????”Ganapathi???

Petersen??2012?????Silicon Valley Band of Angels????????????????????????????200??????????????????????????????????????????????С?顣??????????????????????????????????????????????????????????????λ??????棬????綽?????????????????????????

71???Petersen??????????????????????“?????????????????棬??????????????????Χ????????????????”Petersen???????

????????

??MEMS???????γ?-2019??????5??31????6??2??????????У????γ?????MEMS????????????MEMS???????????????MEMS???????????1?????????????MEMS????????????????NEMS???????????2??MEMS???????????????????????????????????????3????????????????崫????????????????4??MEMSг??????????????????????5??MEMS?????????6??MEMS???????????7??MEMS????ι?????????MEMS???????????о???????????????????????????????
???????
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E-mail??Zhaotingting@memsconsulting.com

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