?????????????????????????????MEMS?????????Harvey C. Nathanson????2019??11??22?????????????????83??Nathanson????????????????????????????????????????????Westinghouse???о????????????????????

Harvey C. Nathanson

1950?????Nathanson???????????Hi-Fi???????????????????????????????????????????????????????????????????????????????Carnegie Technical School??????????????????÷??????Carnegie-Mellon University????

Nathanson????????ò???λ????????????????????1965?????????????MEMS????????????????????????????????е??г????Nathanson??Robert Wickstrom??William Newell????????????????????????????????????????????????????????????????????????г?????????RGT????????????????????????????????????????MEMS??????

Harvey C. Nathanson??????????MEMS????

MEMS???????????????????????????????????????????????????????1980????????????????Motorola????Щ????????????MEMS?????????????????????????????

??????????????????????ɡ????????????壨Analog Devices????1993?????ADXL-50???MEMS???????MEMS????????????г?????????MEMS?????????????????????????綽????????????????????г???????????????????????????

????MEMS?????????Nathanson?????????????????????????????????????????????????????1973??????????????????????侵?????????????????????????????????TI??????????????DLP???????в?????????MEMS???侵???У??????????????????

????MEMS????????

????????????????????о??????????????Nathanson??????????MEMS????????????м?????Nathanson?δ????????????????????????????飺“????????????????????”????????????о?????????????????????????????????????????????????????????о???

Nathanson??????????????y??????????μ???????????????????????????????Nathanson?????“???????????????????????????????????????????????з?????????????????????????”

??????????????????????????????δ?????????????Nathanson???????MEMS????????й?????????????????????Nathanson???о?????????????飬????????????????????????????????????????“???????????о????????·????С?”

?????????????????о??????????????о????????????????????????μ?????????????????????????????????????????????????????????????????檔Nathanson?????????“????????????????????????????????????????????顣”Nathanson??????????????????????????????????????

????????????

Nathanson???????????????????????????С????????????????????飬???????????????????????λ??????????????????????????????й???????????Hi-Fi????????????????????????????????????????????????????????????λ????????????????????????о??????????????????????????????????????????????о?С?鶴??????С????????????????????????????

1965?????29??????????William E. Newell???????????????????????·??С?????г??????????????????????С???????????????????Nathanson?????????????С??????ег??????Nathanson??????“???????????????????????????????IC??????????????????????????????????·??????????????????????д?????????LCг???·????????????????????????Robert Wickstrom?????????????????????г?????????????????????????????????????????????????????????MEMS????????????п??????????????????·??”

Nathanson??MEMS???????????????????????????????????????????????????????MEMS??????????????????????????????????????????????????Research Labs????????????о??????????????????????????????????????????·??3????Northrop Grumman???????????μ???????????????????????????·??3???????????о?С?顣

Nathanson???“????MEMS??????????????????????????????????н????????о???”2001?????????MEMS Industry Group??MIG?????MEMS & Sensor Industry Group????????????????ζ????????Nathanson??????????????????????????????е??????Nathanson??2001????????????????????????2012??????????????·??3???????????

2000??Nathanson???“????????????????????????”?????????????????Э??Institute of Electrical and Electronics Engineers, IEEE????????????￡?Millennium Medal????

???????80?????????????????????????????????????????????磬Nathanson????????????????????RF???????е???????÷?????????Nathanson?????????????????????????????????????й???????????

???????????Nathanson??????MEMS???????豸??????????????μ??????????????????????????“??????”??Nathanson????????????????????????Hi-Fi?????????????????棬?????????????????????——MEMS??

?????????

??MEMS??????-2019?桷

??Cavendish Kinetics MEMS?????г????32CK417R??

??Wispry RF MEMS?????г????

??????????г????Epcos D7005??

??????????гRF????????TCP-3027??

????????????????????г?-2018?桷

??????????豸?г?????????-2019?桷