??????????????????????????????2020???4???????頂???????????????????????С?

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1. ???????????????????2. ??????о?????????????????

0 ????

2020?????????????????嵥????????????????????????????????????????????????????????????????????????????????????????????????MEMS???????????????????????????????????????????????????????micro-electro-mechanical systems??MEMS?????硢MEMS???????MEMS???????MEMS???????????????У?MEMS??????г????????????????????????????????????????????????“???”???????б?????????MEMS?????????й???????г???λ??????????????и????????????????

????????????о???primary research???????о???secondary research?????????????????MEMS?????????ж????????????????????????????????????????????????????MEMS????????????????????MEMS?????г????10???仯???????????MEMS???????????????й?MEMS??????????????????????о?MEMS???緢?????????????????????????????????????MEMS???繤????????в????о????????????????????????????????????￥??????????????????????????????????????????????????????????????????????????????????г?????????

1 MEMS??????????

????????????????????????????????????????????????????????????У??????????????????е??????????????????????????????????????????????????????Ч?????????????硣??????????????????????????????????????á?????????????????????????г?????????????????????????磨electret capacitance microphone??ECM????MEMS?????????????У?MEMS???磨???????硢????????????MEMS???????????С??????????????ü????·??application specific integrated circuit??ASIC??????????????з?????????????????????????????????????????MEMS??????????С????????á??????á??????á????????????????????????????????????????????????????????????????????MEMS???粻???????????????????????????????????????????????????surface mounted technology??SMT????????????????????????????????????????????????????????????????????????????MEMS?????????????????磬??????????豸???????á?

??10??MEMS?????г???????????????????????????????????????????MEMS?????г??????2010???15.9??????????????2019???86.8???????????????????????20.75%?????1?????????????2003??￥?????????????Knowles Electronics?????“￥?????”???????MEMS??????????????????????????????磨Kyocera????????MEMS???????????г???????????????????Motorola???????????RAZR?????￥??????MEMS???磬?????????????????MEMS???????????г????????????????????Apple?????“???”???????????????????Huawei?????“???”????????????Samsung?????“????”??????????????????????????????????MEMS????????????????????????????????????????MEMS?????г???????????????MEMS???粻??????????????????????Щ?????????????????3~4??MEMS???磺1??????????????1?????????????????????1??????????????????????????????????????????????virtual personal assistant??VPA????????????????????IC??MEMS???????????????????????????????????????????????????????????Siri????????????Amazon????Alexa????蹫???Google????Google Assistant?????????Microsoft????Cortana??????????????????????????????????????????“???”??“???”????????????????????????????????????????????????????????????????????true wireless stereo??TWS????????????????????????????????????????????????????????????????????

?1 2010~2019?????MEMS?????г????????????????????

2014??11?￡???????????????????Echo??????????????????????????г?????蹫???????????????ó??????????JD?????“????”????????Baidu????????????й??????缼??????????Alibaba?????“??????”???????????????????????????????????????????????????????Siri??????????????HomePod??в????????????????λ?????????????MEMS????????????2~8??????γ????????С???????????????MEMS?????????????????????MEMS?????????????????2016??9?￡????????AirPods??????????????TWS?????г?????????????????????AirPods 2???????????AirPods Pro????????active noise cancellation??ANC?????????????????MEMS?????“????????????signal-to-noise ratio??SNR????????????acoustic overload point??AOP??????????????”????????????????TWS??????MEMS?????????????????2~3???1??TWS??????MEMS???????????4~6????????????????????????????????TWS??????????MEMS?????????????????????δ??5??TWS?????е?MEMS????????????????????????30%??

2 MEMS?????????

MEMS???????????????“?????????????????”4???????????????????????????????MEMS?????????????????????????????С????????????????????й????????MEMS?????г?????????????????????????????????о????????????????????????Goertek?????“??????”?????????????????????????AAC?????“???????”???????????й???????????????????????????з?????о?????????о???????????????MEMSensing?????“??о???”??????????????????????10??????з?????????MEMS??ASICо????????????????????????????з????????????????????????????MEMS????????????????????MEMS?????????????????????????????????????????????MEMS????????“Fabless???????????????+Foundry????????????????”???????????????????????????????????MEMS???糧?????8???MEMS??????????????????4?????????????????????????????棬?????????????￥??????Knowles????????????????Infineon?????“?????”?????????彎???STMicroelectronics?????“??????”????????????и?????????????????????о???????????????????MEMSening?????“??о???”????????????棬MEMSо???????????????????????????Sony?????????????????????彎??????????????о?????·?????????????????SMEC??????????????????????CSMC??????????????????????????????????MEMS???????????????????豸?????????????????????????????????棬MEMS???糧???????????й??????????????????в??????????????????????????????????????1????ASE????????????????Amkor Technology?????????????????л?????????????TSHT?????“??????”???????????????????????Goodark?????“??????”?????

2010??￥??????????MEMS?????г??д???????????λ???г??????80%?????й?????????????????о???????MEMS??ASIC?????з??????????????MEMS?????????????Щ???й?MEMS???糧???????????2019??￥???????г?????????36%?????????????????????о??????????????????????Gettop?????“???????”?????????й????????????MEMS??????????????????????????????????????????????????????????г?????48%?????????????г??????????????????????ó???????????????????????????????????????????????????????????????????????????裬?????????t???????????????????????????????????????????????????2019??6??13????????壬??Ч????????????????????????????????о?????2020??8??10????????壩???????й?MEMS???糧???????????????????????????????г???????2?????

?2 2019??????????MEMS???糧???г???????????????

￥????????????????????????????г????????????н????????? ??????????????????????????????о????????????????е???г??м????????????????????“??”?????￥?????????????????????й?MEMS???糧???????????????????????????????????????????????????????????????о???????????о??????????????????????????????????????????????????MEMSTech?????????MEMS??????????????????????????Σ???????????????????Щ??????????????????????TWS???????????г??????????????????й????????MEMS????“???”????????????MEMS??????緒?????п??????????????????SV Senstech?????“????????”???????????????п??????????MiraMEMS?????“????????”?????????壨?????????????Senodia?????“??????”???????????????????GMEMS?????“????”??????????????????·??????纼????????????????????Silan?????“????”???????Τ????????????????WillSemi?????“Τ?????”???????????????????й????MEMS???糧?????????????????????Merry?????“????”????????????????????????????????????MEMS??ASIC??о?????????????????????????MEMS???????????

3 MEMS???緢?????

??????????????????豸????????????????????????????3??￡?????????????AirPods????????????????????MEMS?????????????????????磬??????????????????????????????????????λ???????????????????68dB???????MEMS???磻?????????????????????????泡???μ????????????????MEMS????????и????????????130dB??????????????????15~20Hz????????????????????????棬????????????????????????????????豸????MEMS????????????????С???????????????????豸?????????????豸?????????????——“Always On, Always Listening”??“?????????????”?????????MEMS???糧????????ж?????????????/?????????/???????????????????Щ???????????????????????????????????????????????????MEMS????????????Χ????????????−40~125?棨????????????????????−40~85?棩??????????MEMS????????????MEMS??ASICо????????????????????????????????????????Щ????????????1?????2????????????????????????????????????????

???????????????????MEMS??????????????г????????????????λ???????????????????????С???Щ?????????????м?????????Vesper????????????????????????°?????????????Globalfoundries????????????????????????MEMS???硣????????????????MEMS??????????????AlN??????????????????????????????????????????κλ???????????????????????????????????????????????????Vesper????MEMS???繹?????????????????У????????MEMS???????????????????????Vesper???????????????????????????????????????????????????MEMS???粻???????????????г??????????????Vesper??VM3000?????????????200µs???????????????????????????????????????????????????Vesper???????????ZeroPower Listening™????????????????????????????????????????Vesper?????AlN?????????????PZT??????????????????MEMS???磬????????????????????GlobalMEMS????????MEMS??????????????μ?PZT??????????8??羧???????????????MEMS???硣???????MEMS??????????????????????????????Щ???????????????MEMS????????????????????????MEMS?????????PZT???????CMOS???????????????????MEMS????????????????￡???о???????????????????????????????

?????MEMS?????е??????н?????????????????????????????????????????????α????????????????????????????????????????????????仯????????????????????????????仯???????????????“??—??”?????????????????й?????????????????????????MEMS??????????????????????????????????????????????????????????????????????????????????????MEMS?????MEMSо??????????????2010???“?????壨single backplate??”??2014???“????壨dual backplate??”?????2020???“???????sealed dual membrane??”??????????·?????????μ???????????????????????????????????????????????????????????????????????????????????75dB???????????140dB?????????з??????????????????????????????????????佹?????????3?????????????????????????г????MEMS?????????????????????????????????????μ?MEMS????????????????????????????????????????????й???????????????????????????β????????????????????????????????????????MEMS?????Ч?????????????????????????MEMS???????????????????????????????????????????????????????????????????????????????????????棬??????????????????????????????????????????????????????MEMS???????????

?3 ?????????MEMS?????MEMSо????????·

????????????г?????????????Со?????????????????????????????????????????????????MEMSо????棬?г???????????????0.7mm × 0.7mm???????MEMSо???????????С??MEMSо?????????У????????????????????????????????????е??????????á?????MEMSо?????????????????????в??????????????????????????Щ??????????δ??????????MEMSо??????????ASICо????棬??????MEMS?????ASICо???????????????δ????????С?????????????MEMS?????ASICо?????????????????????????????С??硣??MEMS????????????棬?????????豸?????????????????????????С???????С??????罫????????????????????????2.7mm × 1.8mm???????δ???????????????硣???????Щ?????????????????????????????????????????СMEMS????????????????????????????????????????????????MEMS?????????????????????????ò???????MEMS?????????????????

MEMS????????????????????MEMS??ASICо???????·?壨printed circuit board??PCB?????????????????壨????н?????????????????????????·?????????????????????????????γ?????????????????????????????????????????????????????????????????????????????????????????Щ??????????????TWS????????????????MEMS?????г???????????????????????????????????????MEMS?????????????????????????????????豸???????????——??????MEMS???糧??????2??????????????????MEMS???糣????????ó?????????????????????????MEMS????????繃??????????????????????????????????????????????????????????豸????·????????????????У??????Щ??????MEMS??????Ч?????????????????????????????????????????????????????????????????Щ???????MEMS??????????????????????????????????????????????????????????????Gore????????GORE® MEMS????????????????????????????200???????????????а????MEMS?????????????????????——??Ч??????????????????????????????????е???????????????????????????????????MEMS????????????????????????????????MEMS?????????????е?MEMSо??????????????????????????????????“MEMS????+?????????”?????????????

MEMS?????????????豸?????????MEMS???糧?????п????????????????г????????MEMS????????豸????????????????????г?????????????????????????????????????????????????????MEMS????????豸???????????????????????????????????????λ?????????????????????????????????????????????????????λ??????????????????????????в????????????????????????MEMS?????????Ч???????????????????????????????????ò???У???ü???????????“?????MEMS?????????о???????·?壨printed circuit board assembly??PCBA??”????????????????????????????????????????????????????ū??????MEMS?????????????????????????????????????“???????”?????????????MEMS????????????????С???????????????????????????????е??????????????????????????????????

4 ???????????????

???????磬??????????????????????????????δ?????????????????????????????????????????????????????????????????????????????????????MEMS???????????????????????????????γ???????????????????????????硢???????崫?????????????????????????紫??????????????MEMS??????????????????????????????????????????????MEMS????????????????????????????????????????????????￥??????????????????????в?????“???????????????”???·??????????????泤?????MEMS?????г????????λ???????????????????????????????2015??????????????????????Audience????????????????????????????????????????——Audience???????????????????????????￥?????????????????????????????????Voice ID??????￥????????????????????????????????????????????????????????????????????????

???????????????system in package??SiP????3D?????????????????о?????????????С????????????????????????????????????????????￥?????????????????????????磺??????????ASIC?????????磬??IA200??IA201??IA210?????????????????????acoustic activity detector????????????????“???????”??????????????Ч??????????????????????????????????????????????????????????ж??????????????????????????????????????????????????????????????????????????????digital signal processor??DSP????????????????DSP??AISonic™???????磬??IA61x??в??????￥??????????????SiSonic™ MEMS????о???Tensilica???????????DSPо????????壬????????????????????????????????????????????????????????????????????????

AISonic™????????IA61x????е???????“IA610”??￥???????2017??????????“?????????????”??????豸????????豸????????????á?????IA610??????????????DSP?????????????????????????????????????????????????????????????????￥???????????????????????????????????????????????????粣????????????????????IA610??????????MIPI SoundWire????????????????????????????????????????????????????????????????????????￥??????????????????????????????????????????????????????????????????????????????????e??????棬IA610???vivo NEX???????????????“Jovi AI”????????????а??????????????????????????????????????????IA610???OPPO Find X???????????????????????Щ??????1????????“??????”——???????????????????????????????????????????????????????4?????

?4 AISonic™????????IA61x??в???????????

5 ????

????о??????????й?MEMS???糧??????????????????????????з?????о??????滮?????????????и??????й?MEMS???糧??????????????????MEMS??ASICо????????????????????????????з???????????????????????MEMS?????????????????????????????????????У??й?MEMS???糧?????????????г????????????????￥??????????????????????????????棬?й?MEMS???糧???????????????????????￥?????????·????????????????MEMS?????????е???????????????????????????????????????????δ?????й?MEMS???糧??????????????????????“?????”??MEMS????????μ???????????????????г???????

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??TWS????????????????????

?????????豸??Hearables??????????????г?-2020?桷??