????????????????????? Frank

????MEMS?г???????????????????????????????????MEMS??????????????????????????MEMS???硢??????????????MEMS??????????????е??????????????????????MEMS??????????С????????????????????????????????????????????????????????????????????(ECM)?г????????????????????MEMS???????????????????????е????????????????????з????????

???MEMS?????г?????

???????????????????????μ?MEMS??????????????????????????????????????????????????????????????????????????????????????????????????????????????г????????????????????????????????????????????????????????????????????????????豸?????????????????Щ?????????????????????δ?????????????????????С?ɡ??????????MEMS???罫?й??????г???δ?????????罫?????????????????????????????????????????????????Siri??????????????????????????MEMS?????????????????????????????????????Siri?????????????MEMS???????????????????????????н?????????

?1 ????????MEMS?????????г???????

????2015??MEMS??????????????7??????????????MEMS ?????????????PCB?????????MEMS PCB???г???????????????????????5???????????????????????????????????????????????????

????MEMS???????

??????????????????MEMS?г?, Knowles????????????λ, ??н??70%~80%???г?????????????г???????????????????Knowles ?г?

a. ?????IC?????????磺ADI , ST, Epocos , Akustica, ???м???&?????????????

b. ?????ECM???????????磺ACC, Goer-tek ,BSE, ??, ???п???????????????????

???????Ц?????, ????????,???????????????о?:

1??AAC ??iPhone 4??

??????, ??????, ????“?????”о?, ???1.8mm, PCB?????????????

2. Akustica (????)

??????: ???????, ???????, ??PCB?????Cavity, ??????0.9mm2

3. ?????壨ST??

??????: ???????, ???????,?????????????????, ???1.5mm

4. ￥??????Knowles??

??????: ??????, ??????,????????, ???1.1mm

???????????, ??????2009???2010????????, ??????????PCB?????, ?????????????????, ?????????μ????, ???μ?????????С???, ????????, ??????С?????????1.8*2.4mm, ????PCB?м?????????????, ???????????????????????

????MEMS????????????????

?? MEMS PCB??鼯????2-4?????У??г??????????????????????????????????????????PCB?? ??????????MEMS?ж????????????, ?????????????С, ??·??????????????????????У????????3%??????????????·????40%??????????????????????????????·??????????????????????????????????????????и???????????????????????????????????????????????????????????????к???????????ж?????и???????????????????????????????????????????????????????????

??????????????·????????????????????????????·??????????·????溸????????????????????????????????????????????????????????????????????跡???????????????????????????·?????????С???·???粢???????????????????????????????????????????????(????????·?????????????????????)????????????????????????????????????????????????????????????

1. ???????

1.1 ????????????????????????????

a. ????????????·??????????????????????????????????????????????????跡?????10????????????PCB????20????

b.??????????????????????????????????????????50%??

c.????EMI???????????????????????????????EMC????????С????????????????????

d. ???PCB???Ч?????????PCB???3????

1.2 ???????????????????????:

?????????:???????????????????, ??PCB?????????????????????????,????PCB ????????????????????????, ?????????????????

??????: C=S * Dk / T (C:?????, S:??????????????Ч?????Dk:???????糣??, T:????????)

??1???????弼???? ????PCB???????,??????????,????糣??( DK)?????????????, ????????:

a. BC-2000????λ??????: 506pf/inch2??, ??????: 0.05mm??

b. 3M C-Ply (??λ??????:10nf/inch2), ??????: 0.015mm??

??2?????????PCB??????, ????й?????? ,????????????????u??????????????????????: CFP: Ceramic-Filled Photopolymer, (??λ??????????:20nf/inch2)

??3??????????????????????PCB?С?

2. ???????

???????????????????????????????????????????????1%????????????·?????У??????????????PCB?????????????????????С????磬???0402?????50???????????PCB??????????????е?????6nH?????????蹤????1GHz????￡???????п????40??????????????豾???1%???????豾????????м?С????????·???????????????????????????????????С??????????????????辮????10%??????????????????У?????????????????????衣

??????輼?????????????????

??1???????????????????????,??????PCB??,?????????????????????, ?????????跶Χ50~10000ohm???????,???蹫?????????? +/-15%????, ???????ü????????,???, ?????????????Ohmga , Trece?????????0.2um?????

??2????????: ???????????ī,???????PCB????,????????????·??????????,???跶Χ??300~100kohm???.???蹫??Χ???????????+/-20%???,???????

???????????????????·????????

?????????????????????????2?????????????????????MEMS????С????????????????????PCB?????????, ?Щ?????????????PCB????,??????????????????羺??????, ????????Щ???д??????PCB??????

WUS????,WUS???????????????????, ??1999???????????????????з?, ??2002???Knowles?????????????????????, ??PCB????????????????輼???????????, ????????????輼?????????в??,????,???,??????,???????Щ?????????????ù???????????????, ????MEMS??????????, ????MEMS???罵??,????????????, ?ù??????MEMS?г??????

?????·??MEMS????PCB?г???????????????????·??????, ?ù????2007?????????IC ??幤????????????????????????豸,???????MEMS PCB?г?????, ?????ü???????????,??MEMS PCB ?г????????????, ??????????????????,?????????г???????????MEMS ????????????, ??????豸???????????????, ???????г??????????, ?????????????

????????????1992?????????ECM ????PCB, ?????ECM ????PCB ?г???50%???,???????????????????, ????????PCB, ???????????ó??? 2006, 2007??ECM ??????г??????????, ?????2007????з?MEMS PCB???????г????????10%???????????????????????????з????????????????????????????????г????????????MEMS????????????????ο????δ??????????????????MEMS PCB????????????????·????????????????????

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