???????????????MEMS???????TSV?????/????????????????????????????Engineered Material Systems???????????????????EMS???????????MEMS????????????CMOS????TSV?????????????????????DF-3560??????????????????MEMS??IC?????????????????

DF-3650??????????5~100 µm??±5%??????????????????????????????????????????

DF-3560????г???????????????????????飩??????????????154°C??DMA Tan Delta??????25°C????3.25 GPa??????????

DF-3560??EMS???????????????????????е????2???????MEMS??????????·?????????????????????????

?????????

??????????3D IC??2.5D????????????-2016?桷

????????г?-2016?桷