?????????/????????????????????????????????????????С??????????????й????????????????????????????????????????????????Щ??????????ù?????????????????????????MEMS????????/?????????????????????????????????????????????????????????????????

?????????????????????????????????????????????????????????????????????????????????ν?MEMS??????/???????о?????о????y????????S????????????????а?????????????У?????????????/??????????????????о??????“Miniaturized silicon-based capacitive six-axis force/torque sensor with large range, high sensitivity, and low crosstalk”???????Microsystems & Nanoengineering??????

???е????????MEMS??????/???????о?????????д?????????????????????????????????????????????????????????о????????????????????????о??????У??о?????????????????????????9.3 mm × 9.3 mm × 0.98 mm??????MEMS??????/???????о?????о??????????ν??????S????????????????а????????????С?????????????????????Ч????????????????????????????????S??????????????????????????Χ?????????????????????????????????????????

?1 ???о??????MEMS??????/???????о?????????·

?2 ??????/???????????

?3 λ????ж?????

?4 S?????????

?5 ???????????

?6 о????????

??????MEMS??????/???????о?????????о?????????豸???????????/???????????????о?????????????????????????????о?????????????/???????????????????????????????д???????????2.59%FS?????????????????Χ????2.5 N??12.5 N·mm????????????????????0.52 pF/N??0.27 pF/(N·mm)??

?7 о?????????

?8 ?????????????/???????????????????

???????????????о?????????????S????????????????а????????????MEMS??????/???????о???????????????/????????????????????????????????С?????о?????????????????????????????????????????????????????????????й?????????????

?????????https://doi.org/10.1038/s41378-024-00831-0

?????????

?????????????г?-2024?桷

????????????????????г?-2022?桷

??First Sensor?????STARe?????????о??????????

??Merit Sensor???????????MEMSо??????????

???????????????BMP581?????????

???????NovaSensor?????????о?P883???????????