????MEMS???????????????ò???????Ч????????????????????????仯????????仯?????????????????????????????????ò??????????????????????????????Щ???????????????????????????????Щ?????????γ?????????????????????????????MEMS???????????????????????????3????????????о?????????????????????????

????Cr??????????????????V₂O₃????????????￡???????????????ī?????-???????????????????????±???????????????仯?????????????????????Cr????V₂O₃????????????????????????

????????????????????????????????????????????е???????3??????KU Leuven??Michael Kraft???????????????????Michiel Gidts???о?????????о???Cr????V₂O₃????????????????????????Cr????V₂O₃?????????MEMS???????????????????ò?????MEMS???????????????????????о??????“Study on the piezoresistivity of Cr-doped V₂O₃ thin film for MEMS sensor applications”???????Microsystems & Nanoengineering??????

???????о??????У??о???????÷??????????MBE???????????Cr????????4%??V₂O₃??????????????????????????????????о?????MEMS??????????Cr????V₂O₃????????????о???????????????Cr????V₂O₃?????????????????????仯?????????￡?????????????????GFL???222????????????217??????????????????????????ζ??Cr????V₂O₃????????????????????μ????仯???????????????????????ò??????????????е??????????????????

?1 Cr????V₂O₃????????

?2 Cr????V₂O₃???????????????????

?3 Cr????V₂O₃??????????????

?4 Cr????V₂O₃????????????????????????

?????????????????????MEMS???????е??????????о???????????????Cr????V₂O₃?????????????????MEMS?????????????20??????????????????21.81 mV/V/bar????????-25.73 mV/V??????????????-0.076 mV/V/bar/?棬????????????0.182 mV/V/?檔?y?????????о??????????????MEMS?????????????????????????

?5 ????Cr????V₂O₃??????????MEMS?????????

?6 ????Cr????V₂O₃??????????MEMS????????????????????

?????о????????????μ?ī?????-??????????????????????????????????????????????????????MEMS???????С??о??????????????Cr????V₂O₃???????????????????????????????????????????????MEMS???????е????????????????????????????????????Cr????V₂O₃?????MEMS???????е??????????е????????????????????????????????????????????????-?????????????????????????о????????????????????MEMS??????????????????????????????????г?????????????????????

?????????https://doi.org/10.1038/s41378-024-00807-0

?????????

???????????????г?-2024?桷

???????NovaSensor?????????о?P883?????????

??First Sensor?????STARe?????????о??????????

??Merit Sensor???????????MEMSо??????????

???????????????BMP581???????????