??????????????????????????÷???????????MEMS???????????????????????????????????????????Щ??á???????CMOS-MEMS?????????????·???????????????????????????????????????????????????MEMS??????????????в????????????????????????????????????????????????CMOS?????е???ü????·??ASIC?????ɡ??????????????????????????????????????о?????????????????????????忪???????

???????????????????????????????????????????????????????????????????????????У??University of California, Berkeley??????????????????????о?????????????????????????????????????????CMOS-MEMS??????????????????о???SoC?????????????е???????????????EDA???????MEMS????????CMOS????·??Э????????????????????????2?????·???????????????????????0–50??????????Χ???0–10 m/s????????Χ??????????????????????????±1.6%???????2??·?????????????????????±8.9%?????????????????????CMOS-MEMS????????SoC??????????????????????????????????????????????о??????“System-level modeling with temperature compensation for a CMOS-MEMS monolithic calorimetric flow sensing SoC”???????Microsystems & Nanoengineering?????

?1a???????????CMOS-MEMS???????????SoC?????????????????????????????κ???????????裨R_u1??R_u2??R_d1??R_d2???????λ????????????????R_h????????? P+???????ɡ????????????????????2?VTD???????·????????????????????????????CFIA????????·?????1b?????????????????SoC??????о?????SMIC??0.18 μm 1P6M CMOS??????????????MEMS??????????????????????post-CMOS????????

?1 CMOS-MEMS???????????SoC?????????????

?1b??????????и???????·?????2??·?????????У??????????е???R₁/R₂??(R_r + R_c)/R_h??????????k = 5:1??????????????????????????????OPA???2a??????????108.6 dB????????62.8°????λ???????????2b?е?1.5 kΩ???踺??????????OPA??????????????????3.1 mW????????

?1b?????????????????·??????????????????CFIA???2c???????????????ɡ?

?2 MEMS??????????·????????

??????????????????????????????????Ч??·????ECM?????????MEMS???????ASIC??·Э?????????????е?????????????????????檔??????????????ECM???????????????????????????????????????????Χ??????????????о???????????????MEMS??????????????????????????????????3a??3b?????

?3c???????????嶯?????CFD????????????????????????????????3d?????CFD???????????????????????????????????????????ΔT??????????????U????0 m/s??10 m/s??仯???????

?3 MEMS?????????????????????????

???????????????????????Cadence Virtuoso???е?Spectre?????????CMOS-MEMS????????SoC????????????4??????????????2?CTD?????￡?????R_c0 = 750 Ω??α_c = 0?????????????????????????????SoC???????滷??????0 ?浽50 ?淶Χ???仯????????????????0 ?楨25 ???50 ???????μ?CFD????????????????????????????????·???????????????????????????????????

?4 ???????????￡?CMOS-MEMS????????SoC????2????μ??????????ΔT_h???????V_out

???????????????????????????????????post-CMOS?????????5a????????????????????н??в?????5b??5c?????6?????????????SoC??????????????????????????????????????????????????????????????????????????????????????????

?5 ????????SoC??????????????

?????????????SoC?????????????0–50??????????Χ???δ??????????????9 m/s??????????±8.9%????????????????????????10 m/s?????±1.6%?????4b?е??????????????????????????????????????????????Χ???????0?????￡?δ?????????????????й?????????????????????6b?????????????6d????????????????????0???50?????????25????????￡??????????9-10 m/s??????Χ??????????

?6 ???????????￡?????????SoC????2?????2????μ???????ΔT_h???????V_out????

???????????????о????????????EDA?????????????????????????????·????????????????????????CMOS-MEMS???????????SoC???÷????漰?????????????е????????????????軌????Ч??·???????????????????е????????????????????????????????????滮??LP???????????????????????????????Χ??????????????????????????????Ч?????????????????????о????????????????????±1.6%?????????????Χ?0–50 ?棩???????????−10??10 m/s??Χ????????????????????????????????????SoC????????????????????????IoT??????????????е?????????????????о??????????Ч???????

?????????https://doi.org/10.1038/s41378-024-00853-8

?????????

??MEMS??????????????????????????????-2023?桷

??SGX Sensortech???MEMS??????????崫????MP7227?????????

?????????崫???????????г?-2023?桷

?????????崫????SGP40?????????

?????????崫????SGP30???????????