- ????????????????????????????????????
- ??69???????????????γ?????г?????????
- ??????????????г?-2025?桷
- ??68???????????????γ????????????????
- ??SGX Sensortech???MEMS??????????崫????MP7227?????????
- ?????????????紫????????????????????????????
- ?????????????????????????????????
- ????????紫?????????????-2024?桷
- MEMS???????????????????????δ?????
- ??67???????????????γ????????????????
MEMS????????????????
2012-06-29 15:39:29 ???????? ?????0 ?????
Plan Optik AG??г?????????????, ??????????????????(glass)????(quartz)???, ???????????????????????, ???????????ò??????(cap wafer), ?????(carrier wafer), ???????????????+?貧????????.
Plan Optik??????????????????????????????????7???????????????????????????. ???????????????????????????, ????????Plan Optik?????????и????????????????????????????????????????.
Plan Optik ?????????????????????????????????????????????????????, ??????????????????????????????.
Plan Optik ??????????????辧???????????????????, ?????и??????????????????????????, ??????????????, ????Ч???????????????????????????????.
Plan Optik????????????????????????????????, ???????ISO9001-2000, ????????????????TS16949, ????????????????ISO14001?????.
Plan Optik?????鼰????, ????, ???????, ?????????????, ?? Infineon, Motorola, Honeywell, ST Microelectronics, Carl Zeiss??Bosch??.
????(GLASS)????????????(FUSED SILICA)???????????
??????覴??????TTV.
???????????(MEMS)????(Optoelectronics).
???????С??0.5nm.
TTV: С??3µm.
???????(class 1000).
??λ???/?п?(Flats/notches)????SEMI standard(or JEITA).
??????? (GLASS WAFERS)
???????
???: 100, 150, 200??300mm.
???: 200??500µm.
TTV: <10µm ?? <15µm.
?????: ?????MDF (Micro Defect Free)
??????????(STRUCTURED)????(GLASS)????????????(FUSED SILICA)???
???: ??С100µm.
????: ??С10µm.
?й?: ??С10µm.
???????: ???(sand blasting), ??(ultra-sonic drilling), ??????(Diamond drilling), ????(wet etching), ???(moulding).
??????(PROCESS CARRIERS)
??????????.
??????.
???????????(CTE)?????????辧?????.
????????.
???: ?????300mm.
???: ?????100µm.
TTV: С??3µm.
??????: ±5µm.
?????(OPTICAL CAVITIES) ???????.
??????.
????????????????????(WLCSP).
??????: ??? 200 mm.
??????: ?? 200 µm.
Cavity ???: ??С 10 µm.
Cavity ???: ???? 200 µm.
????????: ???.
??????????(CONDUCTIVE VIAS)
????????????辧?????, ???貧??????.
???? MEMS ????????????????????????.
??????: ???? 150 mm.
????????: ??貣??, ????????? 3.3 ppm/K.
???????????: ??????, ?????.
??????????: ?????????.
???????????????(MICROLENSES AND LENSES OF GLASS)
???и???????, ?????, ?????仯.
?????????. ????????.
??????: 50 µm ?? 5 mm.
?????????: ??? 0.6 mm.
????: ??? ????.
???: ????, ???????????.
??????????(MICROLENS SYSTEMS)
????????.
???????????????.
??????????????辧?.
????: ?????. ??????. ???????.
??????????????????????.
??????????????, ??????:
?1????: PLAN OPTIK AG
Carsten Wesselkamp
Tel.: +49 2664 506825 | Fax: +49 2664 506891 | c.wesselkamp@planoptik.com
?й??????: WAFERPLUS ??????
Max Huang
???: 139-18691489 ?綽: +886 2 25285628 | ????: +886 2 25286718 | Email: waferplus.sales@gmail.com ?? kk@waferplus.com.tw
?????????????о???
??????MSA1000?????????????-??????
??????????
- ?????????????MEMS????λ??INS570D??????????????????????
- ??????о?????ASIC??????MEMS??????????????CMUT??
- ????????????????????????SoC?????????OX01E10
- ????214?????12???????MEMS?????????
- ????????????24GHz?????????????SOC??SRK1202A
- ??о???????????????????????????????
- ?????????MEMS??????ToF??????
- TDK?????????6??IMU??ICM-42688-P???????????????????????????
- ????????EPC???GaN???????????????????????????????
- ???????????????ToF???+????IC?????????????????3D???????
???????????
- 323??????о???鹼???????????·??????????
- 1462024?????????????????
- 129TDK???????6??IMU??3??TMR???????9???????????????...
- 118?????Alev 4 CMOS???????????????????????????
- 37???????????????????????????3D?????????ο????
- 34Knightscope????????????K1 Laser???????????????
- 33???????????????????????????????????
- 31TriLite???????СMEMS????????????????????