Powerful MEMS-based Infrared Emitter for NDIR Gas Measurement

?1?Micro-Hybrid????????????JSIR350??в???????MEMS??????????????ú????????????????????????????????????????????????????????????????????????NDIR????????????????????Micro-Hybrid?????????????????á?

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Micro-Hybrid???????е?MEMSо???????????????????????NAC?????????????????????????????ɡ?MEMSо????????о????????????????????γ????????????????豣?????????????繃???????????????MEMSо?????????????

????Micro-Hybrid??????????漲??????????850?檔???????????????????Micro-Hybrid??????г??????????????????

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Micro-Hybrid?????????????к??????????????????????????????????????????????????????????????????????????????￡?????????????????????????á?????????????????????????????????????????????????????????????????????????????????

?????????????????????????????????????????????????????????????????y??ж????????????С??????????????????????е????????????ζ????NDIR?????????????о???????????

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- ????????High membrane temperature??
    * ???????????

- ????????????Good emissivity??
    * ????????Χ?????????????????

- ?????? > 100000С???Long lifetime > 100,000 h??
    * ??????????????

- ??????????Standard industrial housing??
    * ????????????????

- ????????????Full automatic production??
    * ???г??Ч????????????????

- ???????????????壨Possibility to backfill with different gases??
    * ????????????????????

JSIR350-4

????????JSIR350-4???????????????????????????

JSIR350-5

????????JSIR350-5????С??MEMS???????????????????????????????????

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?1?Micro-Hybrid??????????????????????????????????????????Micro-Hybrid????????????????????????Micro-Hybrid?????????????????????

Micro-Hybrid??????????????????????г?????????????ú?LTCC??????Micro-Hybrid??Micro-Epsilon???????????

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