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??????????????????????Vesper?????????????????????Globalfoundries???????????????????????????MEMS???磬???????????Ψ?????????????????????????MEMS???磬???????????????????????豸??????????????????????IoT???豸????????????????????????е???á?

SITRI????????μ?Vesper???MEMS??????????????????????????????????????????????Щ?????????

????????

????Vesper????MEMS????????????????????3.80 mm x 3.00 mm x 1.15 mm??

???X-Ray??

???????X-Ray???????????п????????????????MEMS Die??ASIC Die??????

????OM???

?????????????????MEMS Die???????ò???????????????????

??MEMS Die????????????OM?????????????????Σ???????????

????SEM???

???????????????????SEM????????н??????????????????

??MEMS Die?????????????Die??????????????????????????????

??Pad?????????????Pad???????????????ν?????????????

??MEMS Die?м?????????????????????????????ò????????????