???????????????11??24??????????й?MEMS?????????????????????????????????????????й?????????????????????????о????????“MEMS??????????????????????”?????????????????“????????????????SOI??蹤??”“????TSV-SOI????蹤??”??4??MEMS??????????ù?????????????????????????????????????????????????????????????????λ????????

?????й?????????????????????????о???????????12???????MEMS?????????????η?????12???????MEMS???????????????????MEMS?????????????MEMS?????????????????????MEMS????????

???и?????MEMS????????4??????????Χ400°/s-4000°/s???????????10s???????1σ??????1°/h????????MEMS??????3??????????Χ±2g-±100g???????????10s???????1σ??С??20µg????????????????MEMS??????5?????????5000g??20000g???????

??η?????12???????MEMS???????????????н???????ASIC??·?????????????????????????????????й?????????????????2???????????ж????Χ????????????????????????????????

?????????

??Tronics???????GYPRO3300??

??Epson Toyocom?????????X3500W??

??Sensonor?????MEMS????????飺STIM210??

??????3??MEMS???????MAX21000??

??MEMS??????-2019?桷

???????????г?????-2017?桷

??????Τ??9??MEMS???????????HG1120CA50??

??????Τ??6??MEMS???????????HG4930CA51??

??ADI????6??MEMS???????????ADIS16460??

??Silicon Sensing??????????Z?????????2??????????CMS300??