????????(RF MEMS)????????????LTE???????????4G????????????????????????Σ????????RF???????????????????????????????????????RF MEMS??????????????????(Antenna Frequency Tuning)?????????????????????????磬???????????Ч????????

Cavendish Kinetics???????г?Dennis Yost?????RF MEMS?δ??5??10?????????е????????????????????????????????????????з???

Cavendish Kinetics???????г?Dennis Yost?????????????????????????????Σ???????RF??????????????????λ???????????????RF????????????????????????????????RF????????????????????????Ч???RF MEMS??????????????

Yost???????RF MEMS??LTE?????????????????????????RF MEMS????????Cavendish Kinetics????????????????????????????????LTE??????????????????????????ù?????????3??е??????г?????????RF MEMS???????????????

RF MEMS?????е?г????????????????(Plate)?????????????????????仯?????????????????(Switch)????????????????????幦???????????????????????????????RF??????(FEM)??????????????????????????跡???(Tunable Impedance Matching)?????????????????????Ч???????????????????????а?????????RF MEMS???????????????????в??????????????????????????????RF????????????

?????????????(Qualcomm)???????????????????????????????RF???????????????????????????????????????(CMOS)????????(PA)?????????RFЧ????????????RF MEMS?г???????????????????????Cavendish Kinetics????????????и????Larry Morrell???????????????RF??????????????????????????????????棬?????RF?????????書???Ч??????????RF MEMS????????LTE??????????????ε????????

Morrell???????????????????????????????????????????????????RF MEMS????????????????????????????嵥(BOM)???????????RF???????????????LTE?????????????35%????Ч???????????LTE??LTE-Advanced?????????RF??e????

Yost???????2014??2016??RF MEMS??????????????????RF?????????????????????(Filter)???????(Duplexer)??????????????????????Ч???????????RF MEMS????CMOS????????λ???棬δ??????????????????????????????????????????????????