??????????????????????壨ADI????????????????MEMS????????????SP4T???????????????????????????????????????á?

?????????????翪??????????????/?????·???????????????????“???”??С?????????????????????????????????????????????????

ADI??????????/???????????MEMS??????в?????????????????????С?????????????и???????????????????????MEMS????????????SP4T——ADGM1304??ADGM1004??????DC??0 Hz????14 GHz??????????????????з????磨ESD???????

?1??ADGM1304 SP4T MEMS???????????????????·??????·????????LFCP??????5 x 4 x 0.95????

ADI??MEMS????????????????“????”??????1999?????????????????MEMS????????????????/??????????ADI????MEMS?????????????ù????????????????????????????1????????????????????繽??MEMS????о????????????????IC?????2?????ü???????IC????TTL/CMOS???????н????????????????????????IC??MEMSо????????·?????????????·?壨PCB??????

???????????????????MIL-STD-883?????????????????????????豸??ATE??????á????????ATE???и??????·???Я???·??????????????????????????????????????????

?2???????????MEMS??????????????????????TTL/CMOS??????????

??????MEMS??????????????????????????????RF????Χ?????????????????3.1 V??3.3 V????磬???豸????????????????????????3????????????????????????????????????????????????????????????????????????????????????????????????ADI???????????????????????????????????MEMS????????????????10????

MEMS???????????

??????棬ADGM1004 SP4T MEMS??????и?????????????HBM????????2.5???ESD???????????ADGM1304??????ESD??????????????????????輫????1.8Ω??????DC??0 Hz????14 GHz????????????2.5 GHz????????????0.45?????6 GHz????????????0.63???????DC??0 Hz????6 GHz??????????С??14???????????17????????????RF???????????2.5 GHz?24???????6 GHz?19?????2.4GHz?????????30?????

?3??MEMS??????????????????д?????????????????????

????????е????????????????????????л????????????30????л????????????5????????????????????????????????????????40????8????????????????????????????????????IIP3????????69 dBm????ESD????????ADGM1304???????????4??????????????????36dBm??????????Χ????????????????????????г????????-90 dBc??????г????????-85 dBc??

ADGM1004????ESD??????·?????24??????о????????LFCP??????У?????5 x 4 x 1.45???????TTL/CMOS??????ADGM1304????5 x 4 x 0.95???????????????????????????μ??????1?????

?4??ADGM1304 SP4T MEMS??????????????????????????￡????

?????????????????????????????????????MEMS???????????????????????????????????á???????????????????????????????????????????????????????????????????????????á?