????????? ???

5G????е???????GHz??Χ?????????????????????Щ??????????????????????BAW?????????????????????????????????BAW????????????????????г?????????????????????????????????????????????????????????繅?????????????????????????????沨г?????????????????г???????и????г??????????????

AlSc??????BAW??MEMS?????

?????????????г?????????????????ZnO??PZT??AlN?????У?AlN??CMOS??????????????????AlN??й????FAB???????Zn??Pb??Zr?????????????????????????????AlN??籡???????????????????????????????????????????????????????Sc??AlN?????????????????????????????????

?о???????????35 at% Sc??AlN????????????Keff²??????15.5%?????AlN??keff²??6%????2.6?????????????????3%??????7.7%????????????????????μ?????5G????????????????????????????ε??洦??

AlN?????????Sc????仯

M. Akiyama, et al. Appl. Phys. Lett. 95, 162107 (2009)

AlScN ???????Sc≤43 at%??

???????Sc??????????43 at%???AlScN????????????AlN????????п?????????????ScN?????????ν????????????????????????????Sc???????43%??AlScN???????????????????????????У?AlSc???в??????????????AlScN?????????Sc?????е?????????????????д??????????????????????AlSc?????м???????????????????????????????????????????????????

????????Materion????????8????о??????????????з??????Sc??????AlSc???????Materion?????AlSc?в????????????????2020????????Sc????30 at%??AlSc?в??

?????AlScN??????????????????

1. Al?к?Sc?й?????????????????е???書????????????????AlScN???????????????????N₂??????????Al??Sc?????N?????????????????????AlScN??????????????????????????????????г?????????仯?????????????????????????????о?????????????????????????н??????????????????????

2. AlSc???н????????????в????????б????????????????????￡???N?????????AlScN???????о?????μ??????????ɡ????????????????е????????????????????????????????

????????????AlScN?????????????и??????????Sc??????AlScN?????????????????????????????????

1. AlScN??????????????c??????????????в???????????

2. AlScN????в?????????????

3. AlScN????????????

????о?????????У???????Sc??????AlScN??籡???????????????á?????????AlScN??籡???????????????????BAW??????Χ???????????絽?????????????????????????????

Materion????????100????????????????????????????????????33?????????????????????50??????????????????????????г???????????塢LED???????????????????????洢???????????????????

Materion????????????????????????1???????????7???в???????Materion????????????????????????????????Sc??AlSc???в??????????O????????????????????Χ?????Materion?????AlSc?е????????????????????в?????????????????к???????????????????????Materion????????OEM????????????????????????