- ????????????????????????????????????
- ??69???????????????γ?????г?????????
- ??????????????г?-2025?桷
- ??68???????????????γ????????????????
- ??SGX Sensortech???MEMS??????????崫????MP7227?????????
- ?????????????紫????????????????????????????
- ?????????????????????????????????
- ????????紫?????????????-2024?桷
- MEMS???????????????????????δ?????
- ??67???????????????γ????????????????
??????????????MEMSг?????????и?????????
2021-07-15 15:12:56 ???????????? ?????0 ?????
??????????????????????????綥????????????????????о??????WPI-MANA???о?????????????и????????????????GaN??MEMSг????????г???????и??????????????Q???????????IC??????????????????
?????????????GaN?????????????MEMS?????????????NEMS?????????弼?????????????????????????????????????5G????????豸??
?????????????GaN??MEMSг??????????????????????м???ppm/K??????????????TCF??????????????????600K?????????????
????????????????“????????IoT??”?????????5G??????????????????????????????????????????????????????????????????????????????????????MEMS/NEMS????ο???????????г??????????λ????????????????????????
???MEMSг??????????н????????????????-30ppm/K??????????о???????????????????????????????ν??????????????????????????????????????Щ????????????????????
WPI-MANA?о????????????乤?????——??????????г?????????????????????????????????????????????????
????????????????????μ??????????????????GaN??MEMSг????????????????????10?????????????????????????
??5G?????III?嵪?????????????????????????????????塣??????????????GaN??MEMS??????豸??????????????????????????豸???в??????????
?????о???????"Self-Temperature-Compensated GaN MEMS Resonators through Strain Engineering up to 600 K"?????????IEEE??????????????飬?????????https://ieeexplore.ieee.org/document/9372065??
??????Akoustis??5G???????????????????????Э??
??????????????????????????人???????8???MEMS???????Э??
??????????
- ?????????????????????????IP??FBAR????????????й?MEMS???????
- RF MEMS??????????????????
- ????RF MEMS????????LTE????????????
- ????BAW??????????????????????????????
- SAW??????????и?????г??????????????????
- ?????RF MEMS???????????????????????ü??
- ?????BAW????????в???????????????????????????
- Materion??AlSc??????5G??????е????
- Menlo???????????????????????????TGV?????
- ?????????з?SAW??IPD???????????????????????
???????????
- 1.1K?????BAW????????в???????????????????????...
- 245????????????????RF-MEMS??????CMOS??·????????
- 198????SMR??NEMS??????????FBAR?????С???????????
- 138??????????????????5G??????????
- 84?????????????????????????????????λ?????????...
- 61Nanusens????????????????????????6G????????????
- 53????????????????????????????????????
- 39???????????????????????????У??????????????????