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Coventor?????MEMS??????????????CoventorWare??MEMS+??SEMulator3D??

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???CoventorWare™??MEMS???????????￡?Top-Down Design?????????У?????????????????Bottom-up Design?????????С?

MEMS+????MEMS??IC??????????????MEMS+IC????MEMS+IC????? MEMS+IC?????????????MEMS+?????????????????MEMS?????????????????????????????????????н???????

??MEMS+?У?MEMS???????Innovator???????????????MEMS?????е?MEMS??????(?????)?? ?????????????????????????????????????????????????????MEMS+????????????????????????????(PCell) ??????????????????MEMS??IC???????MEMS??????????????????IC????У???????????????(AMS)???????У?????Cadence Spectre?????з??檔 MEMS????????????Scene3D?п?????????????MEMS?豸?????

SEMulator3D????????????????????????????????????????????????????????????SEMulator3D???????????????????????С?

????????????????TCAD???????????????????????????????????????????????????????????????С??Χ???????о??????????????衣 SEMulator3D?????е???幤????????????????????????TCAD????????????????????? SEMulator3D??????????o??????????????????о??????????????????е???????SEMulator3D???????????????????????????κ?MEMS????????????????

????Coventor???

Coventor????????Microcosm??????1996??????????????????MEMS??????????????????MEMCAD?????Microcosm??????MEMS??????????????????? 2001??Microcosm?????Coventor??????????????????CoventorWare??Coventor?????????????500??????????152λ??????CoventorWare??????繫??????????????????MEMS??????????????MEMS???????г???CoventorWare???80%???г??????У????2001???????????????????????????????????????10???????????????????????